ion mass spectrometer meaning in English

离子质谱仪

Secondary ion mass spectrometer
二次离子质谱计
The films were characterized by diffraction , x - ray photoelectron spectroscopy , scanning electron microscopy , secondary ion mass spectrometer to research their hfa phase , morphology , fluorine content and fluorine distribution
在实验中运用xrd 、 xps 、 sem 、 sims 、 sem等技术对薄膜的相组成、表面形貌、氟含量以及氟分布进行了分析和研究。